Method for characterization of Si waveguide propagation loss.
نویسندگان
چکیده
A new method for measuring waveguide propagation loss in silicon nanowires is presented. This method, based on the interplay between traveling ring modes and standing wave modes due to back-scattering from edge roughness, is accurate and can be used for on wafer measurement of test structures. Examples of loss measurements and fitting are reported.
منابع مشابه
Design of a Low Loss Silicon Based Hybrid Dielectric-Loaded Plasmonic Waveguide and a Compact High Performance Optical Resonator
Here we present the design of a low loss top metal silicon (Si) hybrid dielectric-loaded plasmonic waveguide (TM-SiHDLW) and a compact, high performance optical resonator by numerical simulation based on finite element method. The waveguide adopted a thick (200 nm) top metal stripe structure to yield optimal performance due to reduced Ohmic loss in conductor around the stripe edge/corner. Moreo...
متن کاملSilicon nitride based plasmonic components for CMOS back-end-of-line integration.
Silicon nitride waveguides provide low propagation loss but weak mode confinement due to the relatively small refractive index contrast between the Si₃N₄ core and the SiO2 cladding. On the other hand, metal-insulator-metal (MIM) plasmonic waveguides offer strong mode confinement but large propagation loss. In this work, MIM-like plasmonic waveguides and passive devices based on horizontal Cu-Si...
متن کاملLow loss coupler to interface silicon waveguide and hybrid plasmonic waveguide
A metallic coupler is proposed to interface a silicon on insulator (SOI) waveguide with a narrow hybrid plasmonic waveguide (200× 200 nm). The device operation is investigated and optimized to attain the best tradeoff between the mode confinement and the propagation loss. Calculations reveal that a high confinement and low loss of the energy is achieved from a silicon slab waveguide into the di...
متن کاملEfficient evanescent wave coupling conditions for waveguide-integrated thin-film Si/Ge photodetectors on silicon-on-insulator/germanium-on-insulator substrates
" Efficient evanescent wave coupling conditions for waveguide-integrated thin-film SiGe photodetectors on silicon-on-insulatorgermanium-on-insulator substrates. Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. The MIT Faculty has made this article openly available. Please share how ...
متن کاملFabrication and characterization of As2S3/Y3Fe5O12 and Y3Fe5O12/SOI strip-loaded waveguides for integrated optical isolator applications
We report two novel strategies to integrate magneto-optical oxides on oxidized silicon and SOI platforms based on strip-loaded waveguide structures. By using conventional waveguide fabrication and thin film deposition techniques, strip-loaded waveguides for magneto-optical non-reciprocal phase shift (NRPS) applications can be integrated on a silicon platform. As a demonstration, two structures,...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Optics express
دوره 21 5 شماره
صفحات -
تاریخ انتشار 2013